Abstract

We report on results about surface engraving of metals and semiconductor using a ps thin disk Yb:YAG-amplifier, and fs Yb-doped crystal based laser, and a fiber laser. We show that the maximum ablation rate can therefore be increased by a factor of 1.5 to 2 when the pulse duration is reduced from 10 ps down to 500 fs .

© 2012 OSA