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Conferences > LTST > 2012 > MTh4A > MTh4A.19

Formation of polymer micro-bump with laser rear-side irradiation and sacrificial layer

Jinyou Shao, Linlin Miao, Yucheng Ding, Bing Hu, Xiangming Li, Ziwei Xie, and Qiang chen

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Abstract

This article demonstrates a novel method to fabricate micro-bump on polymer surface by the laser rear-side irradiation. In this method, a metal sacrificial layer is prepared between the transparent substrate and the polymer.

© 2012 Optical Society of America

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