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Femtosecond Laser 3D Microfabrication with Single Exposure or 1D Scanning

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Abstract

Femtosecond laser microfabrication of a 3D microstructure with single-exposure or 1D scanning is realized by the 3D focal field intensity engineering. The two rapid techniques can be switched to fabricate a complex microstructure.

© 2019 The Author(s)

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