We present 3D laser lithography of arbitrary shaped microoptical elements. Their quality, functionality and resiliency to intense femtosecond laser radiation is investigated quantitatively and qualitatively. Ways to increase throughput while maintaining surface quality are proposed.
© 2019 The Author(s)
This paper was not presented at the conference
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
Login to access OSA Member Subscription