Abstract
A new technique of extending the resolution limit for synthetic aperture microscopy with off-axis coherent illumination through a superstrate is used to image a 120nm CD structure with a 0.4NA lens at 532nm (Abbe limit:~665nm).
© 2021 The Author(s)
PDF Article | Presentation VideoMore Like This
Preyom Dey, Cristopher Dankocsik, Alexander Neumann, Ramiro Jordan, and S. R.J. Brueck
FW5E.6 Frontiers in Optics (FiO) 2020
Alexander Neumann, Yuliya Kuznetsova, and S. R. J. Brueck
CMO2 Conference on Lasers and Electro-Optics (CLEO:S&I) 2008
Preyom Dey, Alexander Neumann, and S. R. J. Brueck
JW4A.9 Frontiers in Optics (FiO) 2019