Abstract

Optical properties of point defects irradiated by UV laser with different parameters on fused silica in atmosphere and vacuum are studied. These experiments revealed that the generation and increasing process of laser induced point defects were enhanced by vacuum, and the efficiency of generation of point defects mainly depends on the laser power rather than the pulse number or irradiation dose. In the implantation of oxygen plasma, the intensity of oxygen-deficiency-related defects were reduced. These results indicate that laser induced point defects can react with the oxygen plasma, which may provide a new way to prolong the lifetime of fused silica in high-power laser system.

© 2015 Optical Society of America