Integrated Electo-opto-mechanical Resonators on Silicon Chips

Hong Tang

doi:10.1364/LS.2013.LW4G.3

Frontiers in Optics 2013
OSA Technical Digest (online) (Optica Publishing Group, 2013),
paper LW4G.3
•https://doi.org/10.1364/LS.2013.LW4G.3

Integrated Electo-opto-mechanical Resonators on Silicon Chips

Hong Tang

Laser Science 2013

Orlando, Florida United States
6–10 October 2013
ISBN: 978-1-55752-987-9

From the session
Advances in Nano-Opto-Mechanics I (LW4G)

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H. Tang, "Integrated Electo-opto-mechanical Resonators on Silicon Chips," in Frontiers in Optics 2013, P. Delyett, Jr. and D. Gauthier, eds., OSA Technical Digest (online) (Optica Publishing Group, 2013), paper LW4G.3.

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Abstract

We present our recent efforts on developing integrated electro-opto-mechanical resonators on silicon chips. Strong electrical forces overcome the low actuation efficiency of optical force and meanwhile complement the high displacement sensitivity of optomechanical systems.

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