Absolute Displacement Metrology for the Next Generation of Calculable Capacitor

Mathieu Durand; Yicheng Wang; John Lawall

doi:10.1364/LS.2012.LTu5I.3

Frontiers in Optics 2012/Laser Science XXVIII
OSA Technical Digest (online) (Optica Publishing Group, 2012),
paper LTu5I.3
•https://doi.org/10.1364/LS.2012.LTu5I.3

Absolute Displacement Metrology for the Next Generation of Calculable Capacitor

Mathieu Durand, Yicheng Wang, and John Lawall

Laser Science 2012

Rochester, New York United States
14–18 October 2012
ISBN: 978-1-55752-956-5

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Precision Measurements and Metrology Using Lasers I (LTu5I)

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M. Durand, Y. Wang, and J. Lawall, "Absolute Displacement Metrology for the Next Generation of Calculable Capacitor," in Frontiers in Optics 2012/Laser Science XXVIII, OSA Technical Digest (online) (Optica Publishing Group, 2012), paper LTu5I.3.

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Abstract

Using a high resolution Fabry-Perot interferometer for displacement measurement, we demonstrate 1 pm accuracy over a range of 70 mm using an optical frequency comb and Gouy phase evaluation. We describe the ongoing effort to extend it into air.

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