In-depth Profiling of Multi-layer Samples with Femtosecond Laser

Vanja Margetić; Kay Niemax; Roland Hergenröder

doi:10.1364/LIBS.2002.FA3

Laser Induced Plasma Spectroscopy and Applications
OSA Trends in Optics and Photonics Series (Optica Publishing Group, 2002),
paper FA3
•https://doi.org/10.1364/LIBS.2002.FA3

In-depth Profiling of Multi-layer Samples with Femtosecond Laser

Vanja Margetić, Kay Niemax, and Roland Hergenröder

Laser Induced Plasma Spectroscopy and Applications 2002

Orlando, Florida United States
ISBN: 1-55752-725-3

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Femtosecond LIBS (FA)

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V. Margetić, K. Niemax, and R. Hergenröder, "In-depth Profiling of Multi-layer Samples with Femtosecond Laser," in Laser Induced Plasma Spectroscopy and Applications, A. Sawchuk, ed., Vol. 81 of OSA Trends in Optics and Photonics Series (Optica Publishing Group, 2002), paper FA3.

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Abstract

Femtosecond laser induced plasma spectroscopy (LIBS) and femtosecond laser ablation time of flight mass spectrometry (LA-TOF-MS) were used for analysis of multi-layered samples with sub-micrometer thickness. Feasibility of the fs-LA in-depth profiling is discussed.

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