Abstract
It is well known, the the laser micromachining gets different types of benefits with temporary shaping of a single or a train of ultra short pulses. It exploits material dependent electronic relaxation processes on a sub-picosecond time scale, and heat accumulation on a sub-microsecond time scale. Meantime until now there was no developed method for pulse shaping on a sub-nanosecond time scale, and clear evidence of benefits for micromachining with such pulses.
© 2018 The Japan Society of Applied Physics
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