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Optica Publishing Group
  • JSAP-OSA Joint Symposia 2018
  • (Optica Publishing Group, 2018),
  • paper 19p_231B_5

Direct laser writing with a sub-nanosecond burst of femtosecond pulses exploiting excitation of deformation wave

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Abstract

It is well known, the the laser micromachining gets different types of benefits with temporary shaping of a single or a train of ultra short pulses. It exploits material dependent electronic relaxation processes on a sub-picosecond time scale, and heat accumulation on a sub-microsecond time scale. Meantime until now there was no developed method for pulse shaping on a sub-nanosecond time scale, and clear evidence of benefits for micromachining with such pulses.

© 2018 The Japan Society of Applied Physics

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