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Conferences > JSAP > 2017 > 8a_PB2 > 8a_PB2_1

3D digital holographic semiconductor metrology using Fourier Modal Method

Shin-Woong Park, Jong Hyun Lee, and Hwi Kim

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Abstract

Through-focus Scanning Optical Microscope (TSOM) technology, which has been attracting much attention in the field of semiconductor measurement recently, using a conventional optical microscope, collects 2D images at multiple focal positions for creating 3D data space and extracts intensity profile from them. It is a breakthrough technology for the inspection and measurement of a recent complicated 3D structure semiconductor.

© 2017 Japan Society of Applied Physics, Optical Society of America

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