Abstract

Using subwavelength structures to manipulate the polarization of deep ultraviolet (DUV) light is generally known as difficult with the current nano-fabrication technologies. To ease the fabrication, an aluminum grating with its period slightly smaller than the DUV wavelength was designed to exhibit an inverse polarizing effect. At resonance, a pronounced inverse polarization extinction ratio of 35 dB was obtained in our experiment.

© 2014 Japan Society of Applied Physics, Optical Society of America

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