Abstract
A realtime and high resolution measurement of a surface profile or tomograms with a long working distance is required by the industry. In the previous reports[1,2], we showed a novel single-shot, long range and 2D tomography and profilometry applied for the mirror-like samples based on an optical frequency comb interferometry. It was confirmed that the system was able to expand the tomograms measurement range of approximate 30 mm with resolution of 11 μm by a single-shot of the CCD camera. However, when dealing with a scattering sample, owing to the diffuse reflection, the system suffers a problem from the interference overlapping. Therefore, it was hard to distinguish interference fringe in lateral axis. In this report, we present an improvement of the previous long-range, high resolution and single-shot tomography and profilometry. Fig.1 shows a schematic of the proposed system.
© 2013 Japan Society of Applied Physics, Optical Society of America
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