Abstract

To know a surface profile of an object with a large depth is very important, especially in industrial aspects. The requirement of the fast and high accuracy profilometry is growing day by day. Recent years, the development of optical frequency comb (OFC) generated by a mode-locked femtosecond laser has been used in optical measurements for the refractive index and thickness of an object, which are specified by resolving interferometry, profilometry and tomography. Especially, the OFC can achieve a very precise and wide dynamic range in an absolute distance measurement.

© 2013 Japan Society of Applied Physics, Optical Society of America