Abstract

High resolution cathodoluminescence (CL) technique combined with a scanning transmission electron microscope (STEM) is useful for investigating physical property of a nano-region by detecting an emitted light due to interaction between high energy electrons and materials. Light emission induced by surface plasmons in metal surface structures has been studied by the STEM-CL technique with a high spatial resolution of nanometer scale [1-3]. Resolution of STEM-CL is mainly limited by a probe size of the electron beam, and is typically in the order of 1 nm.

© 2013 Japan Society of Applied Physics, Optical Society of America