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Optica Publishing Group
  • International Photonics and OptoElectronics Meeting 2019 (OFDA, OEDI, ISST, PE, LST, TSA)
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper JW3A.7
  • https://doi.org/10.1364/ISST.2019.JW3A.7

Wafer-level uniformity analysis of waveguide dimensions over a 300-mm silicon photonics wafer

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Abstract

The uniformity of rib waveguide across a 300-mm wafer fabricated by a 90nm CMOS process is evaluated based on a wafer-level testing. The statistical results show that the process of the fabrication is reliable.

© 2019 The Author(s)

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