Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Nano- structure on Si-substrate by Using Innovative Nano-lithography Processes

Not Accessible

Your library or personal account may give you access

Abstract

Some nano-lithography processes have been developed for high density and fine structure mastering process such as e-beam lithography, near field lithography system and DUV lithography system etc. There are still some challenges such as optical diffraction limit, high equipment cost, small writing area and low writing velocity for these lithography machines. In order to overcome this problems, we have developed an innovative and cost effective nano-lithography system by using bule laser pick-up head system to write the thermal mode inorganic photo-resist materials(1)(2). The technique adopts a phase change metal or metal oxide resist film which is sputtered by using vacuum sputtering system. The thermal mode photo resit film can overcome the optical diffraction issues to write smaller pits. In this paper, we use inorganic material with composition GeSbSnOx (GSSO) for thermal lithography and use inductively coupled plasma reactive ion etching (ICP-RIE) to fabricate nano-structure.

© 2011 Optical Society of America

PDF Article
More Like This
Thermal mode photo-resistor process and applications

Hsiu-Wen Wu, Ming Chia Li, Chin-Tien Yang, Chung-Ta Cheng, Shuen-Chen Chen, and Der-Ray Huang
OMD21 Joint International Symposium on Optical Memory and Optical Data Storage (ODS) 2011

Experimental Realization of a Low-loss Nano-scale Si Hybrid Plasmonic Waveguide

Zhechao Wang, Daoxin Dai, Yaocheng Shi, Gabriel Somesfalean, Petter HolmströmLars Thylen, Sailing He, and Lech Wosinski
JThA017 National Fiber Optic Engineers Conference (NFOEC) 2011

Stimulated Emission in Nano-structured Zinc Oxide on Lattice-Mismatched Si Substrate

Shou-Yi Kuo, Wei-Chun Chen, and Fang-I Lai
JSII_12 International Quantum Electronics Conference (IQEC) 2007

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved