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Novel quasi-full-field chromatic confocal surface microscopy using dual LCoS panels and a transmittance-based wavelength plate

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Abstract

An innovative quasi-full-field chromatic confocal surface microscope employing dual liquid ciystal on silicon (LCoS) panels and a transmittance-based wavelength plate is developed to achieve one-shot microscopic surface profilometty with measurement precision of a submicron scale.

© 2020 The Author(s)

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