Abstract

We present a phase recovery algorithm based on the Weak Object Transfer Function. The algorithm is iteratively extended to also apply to non-weak objects. We demonstrate the algorithm on an EUV multilayer defect imaged through-focus on SHARP with both a standard zone plate and a phase contrast zone plate.

© 2015 OSA

PDF Article | Presentation Video

Supplementary Material (1)

Presentation video access is available to:

  1. OSA Publishing subscribers
  2. Technical meeting attendees
  3. OSA members who wish to use one of their free downloads. Please download the article first. After downloading, please refresh this page.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription or free downloads