Absolute shape measurements at high resolution using digital holographic microscope

Tomasz Kozacki; Kamil Liżewski; Julianna Kostencka; Michał Józwik

doi:10.1364/ISA.2014.IW2C.3

Imaging and Applied Optics 2014
OSA Technical Digest (online) (Optica Publishing Group, 2014),
paper IW2C.3
•https://doi.org/10.1364/ISA.2014.IW2C.3

Absolute shape measurements at high resolution using digital holographic microscope

Tomasz Kozacki, Kamil Liżewski, Julianna Kostencka, and Michał Józwik

Imaging Systems and Applications 2014

Seattle, Washington United States
13–17 July 2014
ISBN: 978-1-55752-308-2

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Computational Optics and Microscopy 2 (IW2C)

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T. Kozacki, K. Liżewski, J. Kostencka, and M. Józwik, "Absolute shape measurements at high resolution using digital holographic microscope," in Imaging and Applied Optics 2014, OSA Technical Digest (online) (Optica Publishing Group, 2014), paper IW2C.3.

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Abstract

Digital holographic microscopy is widely used for the precise metrological characterization of elements of microoptics. Nevertheless, the absolute characterization of a three-dimensional deep topography of high gradient objects is still a challenging task. In the paper we discuss experimental and numerical modifications based on spherical and multidirectional object illumination, which are necessary to extend limits and minimize measurement errors.

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