Abstract

Electrostatically actuated MEMS mirrors for focus control have been fabricated. Deflection over 7.3 µm, which corresponds to 67% of the air gap and a focal length of 154 mm, has been achieved using closed-loop control. Low-order aberrations have been corrected and the devices have been utilized in a simple imaging system.

© 2010 Optical Society of America

PDF Article
More Like This
Polynomial Control of MEMS Deformable Mirrors

Yaopeng Zhou, Thomas G. Bifano, Daniel Sumorok, Stephen A. Burns, and Remy Tumbar
FThZ4 Frontiers in Optics (FiO) 2005

Correcting ocular aberrations with a high stroke deformable mirror

Simon Tuohy, Adrian Bradu, Adrian Gh. Podoleanu, and Nicolas Chateau
6627_45 European Conference on Biomedical Optics (ECBO) 2007

High Speed, Compact, Adaptive Optics Using MEMS Silicon Deformable Mirrors

Clara Dimas, Paul Bierden, Thomas Bifano, and Julie Perrault
CMN3 Conference on Lasers and Electro-Optics (CLEO) 2002

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription