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  • Proceedings of the International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011
  • (Optica Publishing Group, 2011),
  • paper J1173

Super-resolution nanolithography in photoreduction polymers

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Abstract

In this paper we present our recent progress on far-field super-resolution enabled nanofabrication in photoreduction polymers. Pupil engineering and spatial photoinduction-inhibited methods will be employed to break the diffraction limit of the beam. The far-field super-resolution provides a revolutionary tool for three-dimensional (3D) imaging, lithography and optical storage.

© 2011 AOS

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