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Optica Publishing Group
  • OSA Advanced Photonics Congress (AP) 2019 (IPR, Networks, NOMA, SPPCom, PVLED)
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper IT3A.3

Up to 1700nm broadband high-efficiency surface-illuminated Ge/Si photodiode with microhole array

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Abstract

We demonstrate a 10Gb/s CMOS-compatible surface-illuminated Ge/Si Photodiode integrated with photon-trapping microhole arrays with broadband high efficiency up to 1700nm. The Ge/Si photodiode has >80% and >73% EQE at 1310nm and 1550nm, respectively.

© 2019 The Author(s)

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