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Conferences > IPRSN > 2018 > JTu2A > JTu2A.25

High-aperture NUV and DUV Microscopy Based on Dioptric Optics. Optical Design

Dmitry N. Frolov, Olga A. Vinogradova, and Alexey D. Frolov

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Abstract

The aspects of the use of dioptric optics for DUV microscopy are considered. The transition to the NUV and DUV range can significantly improve the resolving power of the microscope. Different kinds of crystals can be used as optical materials.

© 2018 The Author(s)

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