Abstract

We report the fabrication of x-ray spiral zone plates (SZPs). Gold patterns were first fabricated on suspended membrane employing electron beam lithography, and then used as a mask to obtain the SZPs by x-ray lithography.

© 2016 Optical Society of America

PDF Article
This paper was not presented at the conference

More Like This
Fabrication of Micro-Optical Systems with Deep X-Ray Lithography

W. C. Sweatt and T. R. Christenson
JWA2 Diffractive Optics and Micro-Optics (DOMO) 2002

Characterization of Zone Plates for lithography and Imaging

Rajesh Menon, Darío Gil, D. J. D. Carter, Xudong Tang, and Henry I. Smith
DWA3 Diffractive Optics and Micro-Optics (DOMO) 2002

Maskless nanolithography with diffractive optics: Zone- plate-array lithography (ZPAL)

O. J. D. Carter, Dario Gil, Rajesh Menon, and Henry I. Smith
DTuC2 Diffractive Optics and Micro-Optics (DOMO) 2000

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription