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Conferences > IPRSN > 2016 > ITu1A > ITu1A.3

Silicon nitride on-silicon 3-dimensional photonic circuits for integrated photodetection

Mike Buzbee, David Lombardo, Qiwen Zhan, Joshua Hendrickson, Andrew Sarangan, and Imad Agha

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Abstract

We develop a new technique for integrating waveguide detectors in a silicon nitride photonic circuit. Fabrication relies on a novel method of selective oxidation as an alternative to chemical-mechanical-planarization with higher yield and tolerance.

© 2016 Optical Society of America

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