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Conferences > IPRSN > 2015 > IT4A > IT4A.5

Statistical Process Design Kits: analysis of fabrication tolerances in integrated photonic circuits

Daniele Melati, Eva Lovati, and Andrea Melloni

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Abstract

Process Design Kits including statistical data are used to study the effects of production process fluctuations on the response of photonic circuits. Sobol indices allow to measure the impact of random parameters on the transfer function variability.

© 2015 Optical Society of America

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