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Conferences > IPRSN > 2015 > IT2A > IT2A.4

Fabrication of Regular and Bi-Level Grating Fiber Couplers using Thermal Scanning Probe Lithography

Sasa Ristic, Matthieu Nannini, Philip Paul, Felix Holzner, and Peter Grütter

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Abstract

Thermal scanning probe lithography is used for patterning of regular and bi-level grating fiber couplers. Tri-layer pattern transfer is presented as a means of amplifying the 2D and 3D grating patterns into the silicon-on-insulator substrate.

© 2015 Optical Society of America

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