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Heterogeneous Integration Methods and Devices

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Abstract

The integration of III-V or III-N materials onto selected regions of a silicon or silicon-on-insulator (SOI) with the goal of creating electronic-photonic circuits is examined. Epitaxial transfer and bonding methods are discussed, as well as issues of CMOS compatibility and the thermal environment of the III-V devices. Possible devices for future electronic-photonic integration are also discussed.

© 2015 Optical Society of America

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More Like This
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