Abstract

We introduce a new approach to reduce losses of amorphous titanium dioxide (TiO2) strip waveguides with sub-wavelength dimensions using atomic layer deposition (ALD) technology. The fabrication process and the characterization are presented.

© 2013 Optical Society of America

PDF Article
More Like This
TiO2-filled Merged Photonic Crystal - Slot Waveguide

Matthieu Roussey, Petri Stenberg, Arijit Bera, Markku Kuittinen, and Seppo Honkanen
JT3A.14 Integrated Photonics Research, Silicon and Nanophotonics (IPRSN) 2013

CMOS-compatible Titanium Dioxide Deposition for Athermalization of Silicon Photonic Waveguides

Kuanping Shang, Stevan S. Djordjevic, Jun Li, Ling Liao, Juthika Basak, Hai-Feng Liu, and S. J. B. Yoo
CF2I.5 CLEO: Science and Innovations (CLEO_SI) 2013

Filling of Slot Waveguides with Versatile Material Systems Using Atomic Layer Deposition

Tapani Alasaarela, Antti Säynätjoki, Petri Stenberg, Markku Kuittinen, and Seppo Honkanen
JTuB4 Integrated Photonics and Nanophotonics Research and Applications (IPNRA) 2009

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription