Photonic Integration in State-of-the-Art Silicon Electronics Processes

Jason S. Orcutt

doi:10.1364/IPRSN.2012.IM4A.2

Advanced Photonics Congress
OSA Technical Digest (online) (Optica Publishing Group, 2012),
paper IM4A.2
•https://doi.org/10.1364/IPRSN.2012.IM4A.2

Photonic Integration in State-of-the-Art Silicon Electronics Processes

Jason S. Orcutt

Integrated Photonics Research, Silicon and Nanophotonics 2012

Colorado Springs, Colorado United States
17–20 June 2012
ISBN: 978-1-55752-946-6

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Electro-Optic Modulators and Switches (IM4A)

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J. S. Orcutt, "Photonic Integration in State-of-the-Art Silicon Electronics Processes," in Advanced Photonics Congress, OSA Technical Digest (online) (Optica Publishing Group, 2012), paper IM4A.2.

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Abstract

Photonic integration within state-of-the-art CMOS and DRAM processes leverages the existing electronic manufacturing infrastructure to minimize cost. Suitable design techniques combined with in-foundry optimization or post-processing have enabled integration within several advanced technologies.

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