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  • Integrated Photonics Research, Silicon and Nanophotonics and Photonics in Switching
  • OSA Technical Digest (CD) (Optica Publishing Group, 2010),
  • paper IWF6
  • https://doi.org/10.1364/IPRSN.2010.IWF6

High Sensitivity Defect-enhanced Silicon Ring-resonator Photodetectors at Telecom Wavelengths

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Abstract

We report the fabrication and characterization of a 29 mA/W sensitivity integrated silicon microring photodetector at 1550 nm. It is formed by a lateral p-i-n junction and defects incorporation via high-energy ion implantation.

© 2010 Optical Society of America

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