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  • Integrated Photonics Research, Silicon and Nanophotonics and Photonics in Switching
  • OSA Technical Digest (CD) (Optica Publishing Group, 2010),
  • paper IWF4
  • https://doi.org/10.1364/IPRSN.2010.IWF4

Waveguide-Integrated Photodiode in Deposited Silicon

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Abstract

We demonstrate photodiodes in deposited polycrystalline silicon at λ=1550nm with 0.15 A/W responsivity, 40 nA dark current, and GHz response time. We propose an interconnect scheme with modulators and photodetectors in the same deposited material.

© 2010 Optical Society of America

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