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Conferences > IPRSN > 2010 > IWE > IWE5
  • Integrated Photonics Research, Silicon and Nanophotonics and Photonics in Switching
  • OSA Technical Digest (CD) (Optica Publishing Group, 2010),
  • paper IWE5
  • •https://doi.org/10.1364/IPRSN.2010.IWE5

3D Woodpile Photonic Crystal Fabrication Using a One Step Scaffold Inversion Method

Leo T. Varghese, Li Fan, Yi Xuan, Lin Zhao, and Minghao Qi

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Abstract

3D photonic crystals can be fabricated in one step through HSQ scaffolds patterned by e-beam lithography and inversed by thin film deposition. A defect-free Si woodpile is demonstrated with transmission dip of 70% near IR.

© 2010 Optical Society of America

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