Vertically coupled microdisk resonators on silicon-on-insulator platform using SIMOX 3-D sculpting

Prakash Koonath; Tejaswi Indukuri; Bahram Jalali

doi:10.1364/IPR.2004.IThF2

Optical Amplifiers and Their Applications/Integrated Photonics Research
Technical Digest (CD) (Optica Publishing Group, 2004),
paper IThF2
•https://doi.org/10.1364/IPR.2004.IThF2

Vertically Coupled Microdisk Resonators on Silicon-on-Insulator Platform using SIMOX 3-D Sculpting

Prakash Koonath, Tejaswi Indukuri, and Bahram Jalali

Integrated Photonics Research 2004

San Francisco, California United States
30 June–2 July 2004
ISBN: 1-55752-774-1

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Microdisks and Resonators (IThF)

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P. Koonath, T. Indukuri, and B. Jalali, "Vertically coupled microdisk resonators on silicon-on-insulator platform using SIMOX 3-D sculpting," in Optical Amplifiers and Their Applications/Integrated Photonics Research, Technical Digest (CD) (Optica Publishing Group, 2004), paper IThF2.

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Abstract

Vertically coupled microdisk resonator structures have been synthesized on Silicon utilizing a modified Separation by Implantation of Oxygen (SIMOX) technique. Resonances are observed with Q values of 6300 and free spectral range of 5.4 nm.

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