Abstract

To reduce the high propagation loss in the passive region due to the p-doped upper clad, a new fabrication process is proposed to integrate undoped upper cladded passive waveguides with a buried ridge stripe semiconductor optical amplifiers. The Fabry-Perot lasers fabricated with this process show the good uniformity. A 4×4 semiconductor optical amplifier gate switch matrix was successfully fabricated using this process technology, due to the low propagation loss of the passive waveguides and the good uniformity of active waveguides.

© 2003 Optical Society of America