Low-loss pre-patterned annealed proton exchanged optical circuits in ion-sliced single-crystal thin films of LiNbO3

A. M. Radojevic; R. M. Osgood; A. N. Roy; H. Bakhru

doi:10.1364/IPR.2001.IWB2

Integrated Photonics Research
OSA Trends in Optics and Photonics Series (Optica Publishing Group, 2001),
paper IWB2
•https://doi.org/10.1364/IPR.2001.IWB2

Low-loss pre-patterned annealed proton exchanged optical circuits in ion-sliced single-crystal thin films of LiNbO₃

A. M. Radojevic, R. M. Osgood, A. N. Roy, and H. Bakhru

Integrated Photonics Research 2001

Monterey, California United States
ISBN: 1-55752-673-7

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Novel Waveguide Materials and Processing (IWB)

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A. M. Radojevic, R. M. Osgood, A. N. Roy, and H. Bakhru, "Low-loss pre-patterned annealed proton exchanged optical circuits in ion-sliced single-crystal thin films of LiNbO3," in Integrated Photonics Research, A. Sawchuk, ed., Vol. 58 of OSA Trends in Optics and Photonics Series (Optica Publishing Group, 2001), paper IWB2.

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Abstract

Proton exchanged optical circuits were pre-patterned on a Z-cut Lithium Niobate wafer and ion-sliced to produce ~10-µm-thick optical chips with a typical measured waveguide propagation loss of 0.2-0.7 dB/cm.

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