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Conferences > IPR > 2000 > IFB > IFB4

Highly Reproducible Methods for Fabrication of InP Reflective Arrayed Waveguide Grating Demultiplexer

Hyung M. Kim, Jeong S. Kim, Heung R. Choo, Dong C. Kim, Keun H. Yoo, Jeha Kim, Byung S. Ham, and Kwang E. Pyun

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Abstract

We have designed and fabricated a reflective type of InP-based arrayed waveguide grating demultiplexer using highly reproducible and novel methods, such as lithography, metal coating for high reflection, and lift-off, not cleaving a chip in half.

© 2000 Optical Society of America

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