Abstract

We present a new approach for monolithic optical waveguide-to-photodetector coupling that enables integration of photodetectors with active integrated-optic components. Several techniques for integrating passive waveguides with photodetectors have been reported [1-3], but to our knowledge integration of detectors with active waveguide modulators has not been demonstrated. This paper reports efficient monolithic coupling between low-loss AlGaAs channel waveguides and multi-GHz GaAs MSM photodetectors, using a device structure and fabrication process compatible with high-performance modulator integration. In combination with on-chip electronics [4], detector integration enables monolithic feedback control of analog external modulators and realization of taps for high-speed optoelectronic signal processing.

© 1992 Optical Society of America