Sensitivity dependences of a silicon-based guided-wave optical flow sensor were examined experimentally. The flow sensor has a diaphragm with a small hole, and its operation is based on Bernoulli’s theorem and the elasto-optic effect.

© 2009 Optical Society of America

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription