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Conferences > IPNRA > 2009 > ITuE > ITuE5

Nanopore Fabrication in Hollow Integrated Waveguides

Matthew R. Holmes, Mikhail Rudenko, Philip Measor, Tao Shang, Holger Schmidt, and Aaron R. Hawkins

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Abstract

We demonstrate the fabrication of micropores/nanopores in hollow antiresonant reflecting optical waveguides (ARROWs) through a combination of reactive ion etching and focused ion beam etching. Optical loss measurements indicate insignificant change in the waveguide loss.

© 2009 Optical Society of America

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