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Conferences > IPNRA > 2009 > ITuE > ITuE2

Advantages of Angled Sidewalls in Slot Waveguides

A. Säynätjoki, T. Alasaarela, A. Khanna, L. Karvonen, A. Tervonen, and S. Honkanen

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Abstract

Advantages of angled sidewalls in slot waveguides are discussed. Enhanced vertical optical confinement in such waveguides is shown. Filling of an angled-sidewall slot structure with conformal growth by atomic layer deposition is discussed and demonstrated.

© 2009 Optical Society of America

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