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Conferences > IPNRA > 2008 > JMB > JMB34

Feasibility of a Silicon-Based Guided-Wave Optical Microphone

Masashi Ohkawa, Manabu Hayashi, Hiroyuki Nikkuni, Noriyuki Watanabe, and Takashi Sato

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Abstract

Feasibility of a silicon-based guided-wave optical microphone was examined in this study. The fabricated microphone has a 10mm×10mm×40μm diaphragm and single-mode waveguides on the diaphragm. The microphone successfully detected sound pressure of 80 dB-SPL at 1 kHz.

© 2008 Optical Society of America

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