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Conferences > IPNRA > 2007 > IWA > IWA2
  • Integrated Photonics and Nanophotonics Research and Applications / Slow and Fast Light
  • OSA Technical Digest (CD) (Optica Publishing Group, 2007),
  • paper IWA2
  • •https://doi.org/10.1364/IPNRA.2007.IWA2

Photonics-Enabled Microcantilever Arrays for Sensor Applications

Gregory P. Nordin, Jong Noh, Yusheng Qian, Jiquo Song, and Seunghyun Kim

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Abstract

We report the design, fabrication, and characterization of differential waveguide splitters for transduction of microcantilever motion for sensor applications. Our approach is scalable to permit hundreds to several thousand microcantilevers on a single chip.

© 2007 Optical Society of America

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