193 nm Scatterfield Microscope Illumination Optics

Martin Y. Sohn; Richard M. Silver

doi:10.1364/IODC.2014.IM3B.6

Classical Optics 2014
OSA Technical Digest (online) (Optica Publishing Group, 2014),
paper IM3B.6
•https://doi.org/10.1364/IODC.2014.IM3B.6

193 nm Scatterfield Microscope Illumination Optics

Martin Y. Sohn and Richard M. Silver

International Optical Design Conference 2014

Kohala Coast, Hawaii United States
22–26 June 2014
ISBN: 978-1-55752-747-9

From the session
Microscopy/Lithography (IM3B)

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M. Y. Sohn and R. M. Silver, "193 nm Scatterfield Microscope Illumination Optics," in Classical Optics 2014, OSA Technical Digest (online) (Optica Publishing Group, 2014), paper IM3B.6.

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Abstract

Illumination optics for a scatterfield microscope for 193 nm light was designed with a commercial catadioptric objective lens. Numerical aperture and diameter of a telecentric conjugate back focal plane were optimized and evaluated for angular illumination.

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