Open Access
Add to BibSonomyAbstract
Historically, illumination design has been linked with the development of microlithography technologies and many tricks have been developed to achieve resolutions below the classical definition. This is a review of illumination engineering in microlithography development.
© 2014 Optical Society of America
PDF Article | Presentation VideoMore Like This
Evolution of Illumination Systems in Microlithography A Retrospective
Alois M. Herkommer
ITuC1 International Optical Design Conference (IODC) 2010
A Brief History of the College of Optical Sciences
James C. Wyant
JS1A.1 Frontiers in Optics (FiO) 2014
A Brief History of Light Management in Solar Cells
Klaus Jäger and Christiane Becker
PvW2B.1 Optical Devices and Materials for Solar Energy and Solid-state Lighting (SOLED) 2021