Abstract
Imaging DOEs, randomly distributed microlenses and sub-λ-structures allow the improvement of the performance of Excimer-based imaging and illumination systems. The potentials and the challenges are discussed especially with the focus on the local profile.
© 2010 OSA, SPIE
PDF ArticleMore Like This
T. Kajava, M. Kaivola, J. Turunen, P. Päätkönen, M. Kuittinen, P. Laakkonen, and J. Simonen
CThO7 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2000
Yuhua Jin, Ali Hassan, and Yijian Jiang
JTu2A.50 Frontiers in Optics (FiO) 2017
Steffen Reichel, Ralf Biertümpfel, and Volker Wittmer
OWC1 Optical Fabrication and Testing (OF&T) 2010