Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Use of diffractive lenses in lithographic projection lenses

Not Accessible

Your library or personal account may give you access

Abstract

Diffractive lenses are very useful to correct chromatic aberrations of lithographic projection lenses. In addition they provide the possibility to correct the Petzval curvature although they do not deliver their own contribution to it.

© 2006 Optical Society of America

PDF Article
More Like This
Using Diffractive Lenses in Optical Design

Dale A. Buralli
DO.242 International Optical Design Conference (IODC) 1994

Field curvature and diffractive lenses

Jose M. Sasian
ThO4 OSA Annual Meeting (FIO) 1991

Aspherical surface characteristics of TV projection lenses

Ellis Betensky
MJ1 OSA Annual Meeting (FIO) 1987

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved