Catadioptric Projection Optical System for Flat Panel Exposure Tool

Michio Kohno; Kiyoshi Fukami; Hitoshi Yoshioka; Shu Watanabe; Akiyoshi Suzuki

doi:10.1364/IODC.2006.TuC4

International Optical Design
Technical Digest (CD) (Optica Publishing Group, 2006),
paper TuC4
•https://doi.org/10.1364/IODC.2006.TuC4

Catadioptric Projection Optical System for Flat Panel Exposure Tool

Michio Kohno, Kiyoshi Fukami, Hitoshi Yoshioka, Shu Watanabe, and Akiyoshi Suzuki

International Optical Design Conference 2006

Vancouver Canada
4–8 June 2006
ISBN: 1-55752-811-X

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M. Kohno, K. Fukami, H. Yoshioka, S. Watanabe, and A. Suzuki, "Catadioptric Projection Optical System for Flat Panel Exposure Tool," in International Optical Design, Technical Digest (CD) (Optica Publishing Group, 2006), paper TuC4.

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Abstract

An advanced catadioptric projection optics installed on state-of-the-art flat panel exposure tool is introduced. Scaling up and aspheric lenses added to the conventional two-mirror optics enlarge off-axis good imaging field, and contribute to increase of the productivity of the machine.

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