Abstract
Preassembled, prealigned microlens systems have been fabricated in PMMA using Deep X-ray Lithography (DXRL)1. These systems consist of crossed cylindrical lenses with ≈0.3-mm apertures. Lithographically defined masks and two exposures from a synchrotron beam can produce arrays of micro- imagers, micro-spectrometers, etc.
© 2002 Optical Society of America
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